JPS6411562B2 - - Google Patents
Info
- Publication number
- JPS6411562B2 JPS6411562B2 JP53100602A JP10060278A JPS6411562B2 JP S6411562 B2 JPS6411562 B2 JP S6411562B2 JP 53100602 A JP53100602 A JP 53100602A JP 10060278 A JP10060278 A JP 10060278A JP S6411562 B2 JPS6411562 B2 JP S6411562B2
- Authority
- JP
- Japan
- Prior art keywords
- phosphorus
- protective layer
- boron
- layer
- amorphous
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910052698 phosphorus Inorganic materials 0.000 claims description 19
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 18
- 239000011574 phosphorus Substances 0.000 claims description 18
- GDFCWFBWQUEQIJ-UHFFFAOYSA-N [B].[P] Chemical compound [B].[P] GDFCWFBWQUEQIJ-UHFFFAOYSA-N 0.000 claims description 15
- 229910052796 boron Inorganic materials 0.000 claims description 10
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 9
- 239000010410 layer Substances 0.000 description 30
- 239000011241 protective layer Substances 0.000 description 26
- 238000000034 method Methods 0.000 description 15
- 239000004065 semiconductor Substances 0.000 description 12
- 239000000758 substrate Substances 0.000 description 11
- 238000001947 vapour-phase growth Methods 0.000 description 10
- 150000001639 boron compounds Chemical class 0.000 description 9
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 7
- 150000001875 compounds Chemical class 0.000 description 7
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 6
- 229910052739 hydrogen Inorganic materials 0.000 description 6
- 239000001257 hydrogen Substances 0.000 description 6
- 238000010894 electron beam technology Methods 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 238000002441 X-ray diffraction Methods 0.000 description 4
- 125000001475 halogen functional group Chemical group 0.000 description 4
- ZOCHARZZJNPSEU-UHFFFAOYSA-N diboron Chemical compound B#B ZOCHARZZJNPSEU-UHFFFAOYSA-N 0.000 description 3
- 238000004453 electron probe microanalysis Methods 0.000 description 3
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 3
- 238000005299 abrasion Methods 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- FFBGYFUYJVKRNV-UHFFFAOYSA-N boranylidynephosphane Chemical compound P#B FFBGYFUYJVKRNV-UHFFFAOYSA-N 0.000 description 2
- 238000000635 electron micrograph Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 238000001505 atmospheric-pressure chemical vapour deposition Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 238000004452 microanalysis Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 150000003018 phosphorus compounds Chemical class 0.000 description 1
- FAIAAWCVCHQXDN-UHFFFAOYSA-N phosphorus trichloride Chemical compound ClP(Cl)Cl FAIAAWCVCHQXDN-UHFFFAOYSA-N 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- FAQYAMRNWDIXMY-UHFFFAOYSA-N trichloroborane Chemical compound ClB(Cl)Cl FAQYAMRNWDIXMY-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Electronic Switches (AREA)
- Non-Adjustable Resistors (AREA)
- Light Receiving Elements (AREA)
- Conductive Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10060278A JPS5527863A (en) | 1978-08-18 | 1978-08-18 | Amorphous phosphorus boron compound |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10060278A JPS5527863A (en) | 1978-08-18 | 1978-08-18 | Amorphous phosphorus boron compound |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5527863A JPS5527863A (en) | 1980-02-28 |
| JPS6411562B2 true JPS6411562B2 (en]) | 1989-02-27 |
Family
ID=14278405
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10060278A Granted JPS5527863A (en) | 1978-08-18 | 1978-08-18 | Amorphous phosphorus boron compound |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5527863A (en]) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH032664U (en]) * | 1989-05-31 | 1991-01-11 | ||
| US9248268B2 (en) | 2009-11-17 | 2016-02-02 | C. R. Bard, Inc. | Overmolded access port including anchoring and identification features |
| US9265912B2 (en) | 2006-11-08 | 2016-02-23 | C. R. Bard, Inc. | Indicia informative of characteristics of insertable medical devices |
| US9421352B2 (en) | 2005-04-27 | 2016-08-23 | C. R. Bard, Inc. | Infusion apparatuses and methods of use |
| US9474888B2 (en) | 2005-03-04 | 2016-10-25 | C. R. Bard, Inc. | Implantable access port including a sandwiched radiopaque insert |
| US9579496B2 (en) | 2007-11-07 | 2017-02-28 | C. R. Bard, Inc. | Radiopaque and septum-based indicators for a multi-lumen implantable port |
-
1978
- 1978-08-18 JP JP10060278A patent/JPS5527863A/ja active Granted
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH032664U (en]) * | 1989-05-31 | 1991-01-11 | ||
| US9474888B2 (en) | 2005-03-04 | 2016-10-25 | C. R. Bard, Inc. | Implantable access port including a sandwiched radiopaque insert |
| US9421352B2 (en) | 2005-04-27 | 2016-08-23 | C. R. Bard, Inc. | Infusion apparatuses and methods of use |
| US9265912B2 (en) | 2006-11-08 | 2016-02-23 | C. R. Bard, Inc. | Indicia informative of characteristics of insertable medical devices |
| US9579496B2 (en) | 2007-11-07 | 2017-02-28 | C. R. Bard, Inc. | Radiopaque and septum-based indicators for a multi-lumen implantable port |
| US9248268B2 (en) | 2009-11-17 | 2016-02-02 | C. R. Bard, Inc. | Overmolded access port including anchoring and identification features |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5527863A (en) | 1980-02-28 |
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